Graphite Boat for CVD Thin Film Deposition
Overview
Graphite boats are essential consumables in CVD (Chemical Vapor Deposition) systems for thin film deposition. These boats hold substrates and source materials during high-temperature deposition processes, providing uniform heating and chemical stability in vacuum or reactive gas environments.
Our graphite boats are machined from high-purity isostatic graphite to ensure minimal outgassing and low metal contamination, making them ideal for semiconductor, photovoltaic, and optical coating applications.
Features
- High purity graphite with low ash content
- Excellent high temperature stability up to 2000C
- Uniform temperature distribution
- Low outgassing in vacuum
- Machined to precise dimensions
- Various shapes and sizes available
- Resistant to thermal shock
Specifications
| Parameter | Value |
|---|---|
| Material | Isostatic Pressed Graphite |
| Carbon Purity | 99.99% |
| Density | 1.85 g/cm3 |
| Ash Content | < 50 ppm |
| Max Temperature | 2000C (vacuum) |
| Surface Finish | Fine machined |
| Tolerance | +/- 0.05mm |
| Length Range | 50mm - 500mm |
| Width Range | 20mm - 100mm |
| Depth Range | 5mm - 30mm |
Applications
- CVD diamond deposition
- Semiconductor thin film processing
- Photovoltaic cell manufacturing
- Optical coating deposition
- Scientific research laboratories
Why Choose Us?
- 15 years experience in graphite machining
- High purity materials for critical applications
- Precision CNC machining capabilities
- Custom designs per customer drawings
- Competitive pricing for bulk orders
- Fast turnaround: 7-14 days
- Worldwide shipping available
- Quality inspection before delivery
FAQ
Q: How long do graphite boats last in CVD processes?
A: Service life depends on process temperature, gas chemistry, and cycle frequency. Typically 50-200 runs before replacement.
Q: Can you make custom shaped graphite boats?
A: Yes, we manufacture custom shapes and sizes based on your chamber dimensions and substrate requirements.
Q: Do you offer coated graphite boats?
A: Yes, we can provide CVD-SiC coated graphite boats for extended service life in corrosive environments.
Hot Tags: graphite boat for cvd thin film deposition, China graphite boat for cvd thin film deposition manufacturers, suppliers, factory, gold and silver cast graphite box, graphite boat, high temperature graphite heating element, silicon crystal graphite, solar silicon crystal growth furnace, solar silicon crystal growth graphite
