Product Overview
High-purity graphite diffusion boats are essential carriers in solar cell manufacturing, holding silicon wafers during high-temperature diffusion and coating processes. Our graphite boats are precision machined from fine-grain isostatic graphite with excellent flatness and wafer-friendly surfaces, ensuring consistent process results and minimal wafer breakage in high-volume solar production lines.
Key Features
- High purity graphite for low contamination solar processing
- Precision machined pockets for secure wafer holding
- Excellent flatness and surface finish
- High temperature stability up to 1200°C+
- Good thermal shock resistance
- Custom slot patterns for different wafer sizes
- Available with CVD SiC coating option
Technical Specifications
| Parameter | Unit | Value |
|---|---|---|
| Material | - | Fine-Grain Isostatic Graphite |
| Bulk Density | g/cm³ | 1.80 |
| Shore Hardness | - | 70 |
| Flexural Strength | MPa | 45 |
| Wafer Size Compatibility | - | 156mm, 166mm, 182mm, 210mm |
| Wafer Capacity per Boat | pcs | 50 - 200 |
| Flatness | mm | ≤0.1 |
| Ash Content | ppm | <100 |
Applications
- Solar cell phosphorus diffusion processes
- Anti-reflective coating (ARC) deposition
- Emitter formation and doping processes
- Silicon wafer oxidation and annealing
- PERC/TOPCon heterojunction solar cell production
- Semiconductor wafer processing equipment
Why Choose Jincheng Graphite Diffusion Boats?
We supply high-quality graphite boats and carriers for solar cell manufacturers and diffusion furnace builders. Our boats are precision machined to exact specifications, ensuring smooth wafer loading and reliable performance in high-volume production. With experience serving both solar and semiconductor industries, we understand the strict contamination and flatness requirements of photovoltaic manufacturing.
FAQ
Q: Do you offer boats for M10, M12 and larger wafer sizes?
A: Yes, we manufacture graphite boats for all standard wafer sizes including M0, M2, M4, M6, M10, M12 and G12. We can also produce custom boats for special wafer dimensions and formats. Please specify your wafer size and boat capacity requirements.
Q: Is CVD SiC coating available for graphite boats?
A: Yes, we offer CVD silicon carbide coating for graphite diffusion boats. SiC coating significantly extends boat service life, reduces particle generation, and minimizes boron contamination - critical for high efficiency solar cell production.
Q: What is the expected service life of a graphite diffusion boat?
A: Typical service life is 6-12 months in continuous diffusion furnace operation, depending on process temperature, gas chemistry, and handling practices. SiC coated boats can last 2-3 times longer than uncoated graphite boats.
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