Graphite Diffusion Boat for Solar Silicon Wafer
Product Overview
Our precision graphite diffusion boats are designed for phosphorus and boron diffusion processes in crystalline silicon solar cell manufacturing. Made from high-purity isostatic graphite, these graphite boats provide excellent temperature uniformity, wafer support, and long service life in high-temperature diffusion furnaces.
We manufacture graphite diffusion boats for all major solar cell production furnace models. Our boats feature precision-machined wafer slots that ensure consistent wafer spacing and uniform diffusion results. Custom slot designs available for various wafer sizes (M0-M10) and furnace configurations.
Key Features
- High purity graphite for contamination-free diffusion
- Excellent temperature uniformity across all wafers
- Precision machined wafer slots for consistent spacing
- High temperature strength up to 1000°C diffusion process
- Low outgassing for clean diffusion environment
- Various configurations for vertical and horizontal furnaces
- Compatible with all major furnace brands
- Long service life for high-volume solar production
Technical Specifications
| Parameter | Specification |
|---|---|
| Material | High purity isostatic graphite |
| Purity | ≥99.99% |
| Density | 1.80-1.85 g/cm³ |
| Max Temperature | 1050°C (diffusion process) |
| Wafer Size Compatibility | M0 to M10 (custom) |
| Slot Pitch | 2mm to 5mm (custom) |
| Slots per Boat | 50 to 200 (custom) |
| Flatness | ≤0.05 mm |
Applications
- Phosphorus emitter diffusion in solar cell production
- Boron emitter diffusion for n-type solar cells
- POCl3 diffusion processes
- Thermal oxidation of silicon wafers
- Annealing and curing processes in solar manufacturing
- R&D and pilot line solar cell development
Why Choose Jincheng Graphite?
- Specialized in solar cell graphite parts for 15+ years
- Precision slot machining for consistent wafer support
- High purity materials for high-efficiency solar cells
- Replacement boats for all major diffusion furnace brands
- Custom configurations for your furnace line
- Competitive pricing for solar cell manufacturers
- Fast delivery for production maintenance
- Quality consistency from batch to batch
FAQ
Q: What wafer sizes do your diffusion boats support?
A: We manufacture graphite diffusion boats for all standard wafer sizes from 100mm (M0) up to 182mm (M10). Custom slot designs are available for new wafer sizes as the industry evolves.
Q: How long does a graphite diffusion boat last?
A: Typical service life is 6-12 months depending on diffusion temperature, process gases, and cycle count. Proper boat cleaning and handling extend usable life significantly.
Q: Do you offer SiC coating for diffusion boats?
A: Yes, we offer CVD SiC coating service that dramatically extends boat life and reduces particle contamination in high-efficiency solar cell production. Coated boats last 3-5 times longer than uncoated ones.
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