Graphite Heating Element and Graphite Set for CVD Coating Furnace
Product Overview
Our graphite heating elements and complete graphite sets are purpose-built for chemical vapor deposition (CVD) coating furnaces used in SiC, pyrolytic carbon, and carbon-carbon composite manufacturing. These high-purity graphite heating assemblies operate at temperatures up to 2200°C in vacuum or controlled gas atmospheres, providing uniform radiative heating essential for consistent CVD deposition. We supply complete hot-zone graphite sets including heating elements, insulation felt, support posts, and baffles, engineered as direct drop-in replacements for major CVD furnace brands.
CVD processes demand graphite components that are ultra-pure, dimensionally stable at extreme temperatures, and resistant to corrosive process gases such as methyltrichlorosilane (MTS), silane, and hydrogen. At Jincheng Graphite, we manufacture both individual heating elements and complete turnkey graphite hot-zone assemblies. Our engineering team can work from your furnace drawings or reverse-engineer your existing worn set, delivering precision-machined components that restore furnace performance to original specifications.
Key Features
- Ultra-high purity graphite - ash content < 100 ppm for contamination-free CVD environments
- High temperature capability - continuous operation up to 2200°C in vacuum or inert gas
- Uniform temperature profile - engineered element geometry for ±5°C uniformity across the work zone
- Complete hot-zone sets available - heaters, insulation, supports, and baffles as one assembly
- CVD-resistant materials - grades selected for resistance to MTS, silane, and hydrogen plasmas
- Precision machined connections - robust electrical contact surfaces for reliable power transfer
- Direct replacement design - drop-in compatible with existing furnace cooling plates and feedthroughs
- Refurbishment service - worn sets can be re-machined and refurbished for extended life
Technical Specifications
| Parameter | Value |
|---|---|
| Material | Ultra-high purity isostatic graphite |
| Bulk Density | 1.80 - 1.88 g/cm³ |
| Ash Content | < 100 ppm |
| Flexural Strength | 50 - 65 MPa |
| Electrical Resistivity | 13 - 17 µΩ·m |
| Thermal Conductivity | 110 - 140 W/(m·K) |
| Max Operating Temperature | 2200°C (vacuum / inert) |
| Element Types | Cylindrical, grid, strip, cantilever |
| Dimensional Tolerance | ±0.05 mm |
| Insulation Material | Graphite felt / rigid graphite board |
| Compatible Furnace Types | CVD, CVI, SiC deposition, pyrolytic carbon |
| Power Connection | Clamp or threaded, per furnace design |
Applications
- SiC CVD coating - graphite heaters for SiC deposition on graphite substrates
- Pyrolytic carbon coating - CVD carbon coating for biomedical and aerospace components
- CVI carbon-carbon composites - chemical vapor infiltration furnaces for C/C braking systems
- Graphene and carbon nanotube growth - high-temperature CVD reactors for 2D material research
- Diamond CVD growth - microwave plasma and hot-filament diamond CVD furnaces
- Optical fiber preform manufacturing - CVD furnaces for optical fiber deposition
Why Choose Jincheng Graphite?
- CVD furnace expertise - deep experience with CVD and CVI hot-zone design
- Complete sets, not just parts - we design and deliver entire graphite hot-zone assemblies
- Material selection for corrosive gases - recommend grades that resist your specific process chemistry
- Reverse engineering - we replicate worn hot-zone sets from samples or drawings
- Refurbishment program - save 40-60% by refurbishing rather than replacing entire sets
- Engineering support - thermal profile and electrical resistance optimization
- Global shipping - vacuum-packed export to CVD equipment makers worldwide
- Competitive cost - significant savings over Western hot-zone suppliers
FAQ
Q: Can you supply a complete hot-zone set rather than just heating elements?
A: Yes. We supply complete graphite hot-zone assemblies including heating elements, graphite felt insulation, support posts, baffles, and electrode feedthroughs. Send us your furnace model or existing set dimensions, and we will quote a complete drop-in replacement.
Q: How long does a CVD graphite heating element last?
A: In a well-controlled CVD environment (vacuum < 10-3 mbar, no leaks), graphite heating elements typically last 2-5 years. Corrosive process gases and air leaks are the main causes of premature failure. We recommend regular inspection of element cross-sections for thinning.
Q: Can you refurbish our existing hot-zone set?
A: Yes. We offer a hot-zone refurbishment service: we re-machinable worn heating elements, replace degraded insulation, and repair support structures. This typically extends furnace life at 40-60% of the cost of a new set.
Q: What information do you need to quote a replacement set?
A: Please provide the furnace model, a drawing or photo of the existing hot-zone, the chamber dimensions, and the operating temperature and atmosphere. If you have the original part numbers or material grades, include those as well.
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