Graphite Heater for CVD Furnace
Product Overview
Jincheng graphite heaters for CVD furnaces are precision-machined graphite heating elements designed for chemical vapor deposition processes in semiconductor, solar, and optical coating applications. These heaters provide uniform heating and excellent temperature control for high-quality thin film deposition.
Our CVD furnace heaters are manufactured from high-purity, fine-grain isostatic graphite that provides consistent electrical resistivity and long service life at CVD processing temperatures. Custom heater designs and configurations are available to match different CVD furnace models and process requirements.
Key Features
- High purity graphite with low ash content for clean CVD processing
- Consistent electrical resistivity for uniform heating and accurate temperature control
- Excellent temperature uniformity for consistent thin film deposition results
- High temperature stability up to 1600°C in various CVD process atmospheres
- Precision machined heater geometry for optimized heat distribution
- Custom heater designs for various CVD furnace configurations and sizes
- Good thermal shock resistance for repeated heating and cooling cycles
- Long service life with proper atmosphere control and operating conditions
Technical Specifications
| Parameter | Value |
|---|---|
| Material | High purity fine grain isostatic graphite |
| Density | 1.78 - 1.88 g/cm3 |
| Ash Content | < 100 ppm (CVD grade) |
| Shore Hardness | 60 - 75 HS |
| Electrical Resistivity | 8 - 13 uOhm·m |
| Flexural Strength | 50 - 70 MPa |
| Max Working Temperature | 1600°C (in CVD process atmosphere) |
| Heater Design | Custom per furnace model |
| Heater Size | Custom per furnace hot zone |
| Temperature Uniformity | ±5°C (typical, with proper design) |
Applications
- Semiconductor CVD processes for thin film deposition and epitaxial growth
- Solar cell CVD processes for anti-reflection coating and passivation layers
- Optical coating CVD processes for precision optical thin films
- Hard coating CVD processes for wear-resistant and corrosion-resistant coatings
- Graphene and 2D material CVD growth for advanced materials research
- CVD furnace maintenance for furnace rebuild and heater replacement
Why Choose Jincheng Graphite Heaters?
- CVD-grade high purity graphite optimized for thin film deposition processes
- Precision CNC machining with accurate heater geometry for optimal temperature uniformity
- Experience with major CVD furnace brands including Applied Materials, TEL, and Kokusai
- Custom heater design based on your furnace specifications and process requirements
- Competitive pricing compared to imported CVD heater elements
- Fast delivery - standard heaters within 1-2 weeks, custom within 3-4 weeks
- Technical support for heater design optimization and CVD process improvement
- Global shipping to semiconductor fabs, solar manufacturers, and research institutes worldwide
Frequently Asked Questions
Q1: What is the typical service life of CVD furnace heaters?
A: Heater life depends on CVD process temperature, atmosphere, and operating conditions. Under typical semiconductor CVD conditions, graphite heaters last 6-12 months before needing replacement.
Q2: Can you manufacture heaters based on my existing heater drawings?
A: Yes, we manufacture custom heaters based on your existing heater drawings or furnace specifications. Please provide your heater drawings or furnace model for quotation.
Q3: Do you offer tantalum carbide (TaC) coated heaters?
A: Yes, we offer TaC coating services for extended heater life and reduced metal contamination in advanced CVD processes.
Q4: How do you compare to OEM heater elements?
A: Our graphite heaters provide comparable performance to OEM heaters at a more competitive price. We work closely with customers to ensure our heaters meet their specific process requirements and quality standards.
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