Graphite Heater For Vacuum Furnace

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Graphite Heater For Vacuum Furnace
Details
Graphite heating elements are the core components of vacuum furnaces and high-temperature industrial heating systems. They convert electrical energy into heat and provide stable high-temperature environments required for industrial processing. Our graphite heating elements are manufactured from high-density isostatic graphite, ensuring excellent electrical conductivity, high temperature resistance, and long service life.
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Graphite Hot Zone Components
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Description

 

Semiconductor Graphite Heat Sinks

Under vacuum or inert atmosphere, by using high-purity graphite under isostatic pressure and properly controlling temperature and thermal cycling, the graphite heater can be used stably for over 10,000 hours, which is 5 to 10 times longer than that of metal heaters (such as molybdenum wire and silicon-molybdenum rods, with a lifespan of 1,000 to 2,000 hours).

Performance items Conventional high-purity graphite High-end isostatic pressed graphite
Carbon content ≥99.9% ≥99.99%
Density 1.75~1.85 g/cm³ 1.85~1.95 g/cm³
Ash content ≤0.1% ≤0.01%
Open porosity rate 10%~15% 5%~10%

 

Material upgrade: Preferentially select isostatic graphite, with ultra-high purity grade (≥99.99%) suitable for precision processes
Atmosphere optimization: Maintain a vacuum degree of 10⁻³Pa or higher in the vacuum furnace, control the dew point <-40℃; Oxidative atmosphere must apply a SiC anti-oxidation coating
Process adjustment: Reduce the heating rate to 5-8℃/min, reduce frequent startups and shutdowns, and avoid short-term over-temperature
Structural optimization: Adopt a multi-stage combined design to distribute power; avoid local overheating areas; reasonably design the connection terminals
Regular maintenance: Check once every 1000 hours, clean the surface, measure the resistance change, and replace damaged components in time

Performance items Standard value
Room temperature volume resistivity 8~13 μΩ·m
Resistance temperature coefficient Negative coefficient, high-temperature resistance does not soar
Applicable operating voltage Low-voltage high-current compatible: 380V / Industrial-specific transformer
Single branch rated power range 0.5kW~500kW
Semiconductor Graphite Uniform Temperature Plate

 

 
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who choose us?

 

1. Super high quality: Comprehensive control over every aspect from materials to processes.
2. Core technology fully controllable: Proficient in key processes such as high-temperature graphitization and purification, supporting 72-hour non-standard customization response.
3. Ultimate quality guarantee: High-purity products reach 5N + purity, resistant to 3000℃ high temperature + strong corrosion, with full batch traceable testing.
4. Uninterrupted full-cycle service: Large-scale production + 5-7 days small-batch delivery, 24-hour technical response + on-site support.

one-stop solution

professional team

high quality

 

 

Special graphite heater for vacuum furnaces - Detailed advantages
Graphite Heating Elements for Semiconductors
Exceptionally high temperature resistance, does not melt or soften at high temperatures
The self-sublimation temperature of graphite is as high as 3650℃. It can operate stably for a long time at 2200-2500℃ in a vacuum environment, and can reach up to 3000℃ for a short period.
Compared with metal heaters such as molybdenum and tungsten, they will soften and deform above 1800℃, while the mechanical strength of graphite increases with higher temperature. It is the only reliable heating element for ultra-high temperature vacuum furnaces.
Graphite Heating Elements for Semiconductors
Excellent thermal field uniformity and high temperature control accuracy
Graphite has excellent thermal conductivity, isotropic material properties, and uniform heat radiation. The internal temperature difference in the furnace is small.
It can achieve precise constant temperature control, ensuring uniform heating of the workpiece, avoiding local overheating or underheating, and significantly improving the yield rate of sintering, annealing, and brazing products.
Graphite Insulation in Semiconductors
High electrical-to-thermal conversion efficiency, energy saving and consumption reduction
The efficiency of converting electrical energy to thermal energy can reach over 90%. The heating speed is fast, and heat dissipation is small.
Compared with metal heaters, it heats up faster under the same power and has better heat preservation effect. It can save 20%-30% energy over the long term and reduce the electricity cost of the factory.
High-temperature Vacuum Graphite Parts
Extremely low thermal expansion coefficient and extremely strong thermal shock resistance
The thermal expansion coefficient of graphite is very small, and the deformation during temperature rise and fall is negligible.
It can withstand rapid temperature rise and rapid cooling cycles without cracking, chipping, or deformation. It is suitable for frequent start-stop and continuous production conditions of vacuum furnaces.

 

Help FAQ
Common Problem
  • Life span of vacuum furnace graphite heater: Comprehensive analysis of core data and influencing factors

    The service life of the vacuum furnace graphite heater is not a fixed value. It mainly depends on the working conditions, material grade, structural design and maintenance level. The typical range is between 3,000 and 15,000 hours.

 

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