Carbon Carbon Composite Fixture For Semiconductor Furnace

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Carbon Carbon Composite Fixture For Semiconductor Furnace
Details
High performance carbon-carbon composite components for semiconductor furnace hot zones. Exceptional high temperature strength and thermal shock resistance outperforms solid graphite.
Category
Carbon Fiber Composite Plate
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Description

Product Overview

Carbon-carbon (C/C) composite fixtures and components are increasingly replacing traditional graphite in high-temperature semiconductor processing and furnace applications. With exceptional mechanical strength at high temperatures, low thermal expansion, and excellent thermal shock resistance, C/C composite materials provide superior performance and longer service life in demanding hot zone environments.

Key Features

  • High strength at temperatures up to 2000°C and above
  • Excellent thermal shock resistance - no brittle fracture
  • Low coefficient of thermal expansion for dimensional stability
  • Lightweight compared to graphite and ceramic alternatives
  • High thermal conductivity for uniform heating
  • Good corrosion resistance to most molten metals
  • Custom shapes and geometries precision machined

Technical Specifications

Parameter Unit Value
Material - Carbon/Carbon Composite (C/C)
Density g/cm³ 1.4 - 1.6
Tensile Strength MPa 180 - 250
Flexural Strength MPa 200 - 300
Compressive Strength MPa 150 - 200
Thermal Conductivity W/(m·K) 80 - 150 (directional)
Coefficient of Thermal Expansion 10⁻⁶/K 1.0 - 2.0
Max Working Temperature °C 2200 (inert/vacuum)
Elastic Modulus GPa 30 - 60

Applications

  • Semiconductor crystal growth furnace hot zone components
  • CVD/CVD reactor fixtures and susceptors
  • Heat treatment furnace support structures
  • Continuous casting tooling and guides
  • Aerospace high-temperature structural components
  • Rocket propulsion and re-entry vehicle parts
  • Glass industry forming tools and rollers

Why Choose Jincheng C/C Composite Components?

We supply precision-machined carbon-carbon composite components and fixtures for semiconductor furnace builders, aerospace companies, and industrial equipment manufacturers. Our C/C composite parts are manufactured to exacting specifications with tight tolerances and superior surface finish. With deep expertise in both graphite and C/C composite machining, we can recommend the optimal material for your specific application and deliver high-quality components that improve process performance and reduce downtime.

FAQ

Q: What is the advantage of C/C composite over solid graphite?
A: C/C composite has significantly higher mechanical strength and toughness, especially at high temperatures. It does not fracture like brittle graphite, and its thermal shock resistance is far superior. While C/C composite is more expensive upfront, its much longer service life often results in lower total cost of ownership.

Q: Can C/C composite be machined like graphite?
A: Yes, C/C composite can be machined using similar carbide tooling as graphite, but it requires different feeds and speeds due to its higher abrasiveness. Our machining facility is equipped with specialized CNC equipment and tooling for precision C/C composite machining.

Q: What sizes of C/C composite parts can you produce?
A: We can produce C/C composite components up to approximately 600mm x 600mm x 300mm depending on material availability. For larger structures, multiple C/C components can be joined using carbon fiber fasteners or ceramic joining methods. Please specify your dimensions and we will advise on feasibility.

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