Semiconductor graphite heating elements
Jincheng Graphite, as a professional manufacturer of graphite products, provides high-purity and high-stability semiconductor graphite heating elements. These are specially designed for high-temperature processes of wafers, vacuum equipment, and precise thermal management scenarios. They possess core advantages such as high temperature resistance, low thermal resistance, and long lifespan, and are widely used in the semiconductor manufacturing industry.
Core Strengths
High purity and high-temperature resistance
Utilizing nano-scale graphite substrate, with a carbon content of ≥ 99.99%, it can withstand temperatures above 1500℃. It is suitable for high-temperature processes such as semiconductor wafer annealing and sintering, preventing material oxidation or structural deformation.
Low thermal resistance and uniform heating
Through a special sintering process, the thermal conductivity is enhanced to 200-300 W/m·K, with a thermal resistance lower than 0.1 K/W. This ensures uniform temperature on the wafer surface, reducing the decline in yield caused by local overheating.
Mechanical strength and chemical stability
After high-temperature sintering, the compressive strength is ≥ 40 MPa, resistant to acid and alkali corrosion, and suitable for the high cleanliness environment in semiconductor manufacturing, extending the service life of the equipment.
Application Scenario
Wafer high-temperature processing equipment
As the material of the heating chamber, it can withstand extreme temperature fluctuations, ensuring the thermal stability of the wafer during processes such as annealing and deposition.
Vacuum heat treatment system
Combining the low friction characteristics of graphite heating elements, it is suitable for high-vacuum environments for high-temperature heating, reducing contamination caused by gas adsorption.
Semiconductor packaging hot pressing equipment
Achieving rapid and uniform heating through high thermal conductivity, it improves the efficiency of packaging processes and reduces energy consumption costs.
Technical Parameters
| Carbon content | ≥ 99.99% |
| Thermal conductivity | 200 - 300 W/m·K (test conditions: 25℃) |
| Compressive strength | ≥ 40 MPa |
| Operating temperature range | -200℃ to 1500℃ |
| Surface treatment | Polishing / Coating (customizable) |
Jincheng Graphite Quality Assurance
Based on 20 years of graphite material research experience, Jincheng Graphite adopts patented sintering technology and nano-composite technology to ensure the stability of semiconductor graphite heating elements under extreme conditions. Certified by ISO 9001 quality system and AS9100 aerospace standards, it meets the requirements of high cleanliness and high reliability scenarios.
Cooperation Commitment
Jincheng Graphite provides customized heating element solutions, supporting both small-batch trial production and large-scale mass production, ensuring a short delivery cycle and controllable costs. Through the global logistics network and local service team, it offers efficient and reliable integrated services for graphite heating elements to customers, helping to upgrade semiconductor manufacturing processes.
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