Product Overview
Precision-machined graphite base plates are essential components in semiconductor manufacturing equipment, providing a stable, flat, and thermally conductive platform for wafer processing, deposition, and etching processes. Our graphite base plates are manufactured from high-purity isostatic graphite with excellent flatness and surface finish, ensuring consistent performance in demanding semiconductor fabrication environments.
Key Features
- Ultra-flat surface with tight flatness tolerance up to 0.02mm
- High purity material with low contamination for semiconductor processing
- Excellent thermal uniformity for consistent wafer temperature
- High temperature stability up to 2000°C in vacuum or inert atmosphere
- Good machinability for custom hole patterns and geometries
- Low outgassing and particle generation for cleanroom compatibility
- Available with CVD silicon carbide coating option
Technical Specifications
| Parameter | Unit | Value |
|---|---|---|
| Material Grade | - | Isostatic Graphite |
| Bulk Density | g/cm³ | 1.80 - 1.88 |
| Shore Hardness | - | 65 - 80 |
| Flexural Strength | MPa | 40 - 55 |
| Surface Flatness | mm | ≤0.02 |
| Surface Roughness | Ra μm | ≤1.6 |
| Thermal Conductivity | W/(m·K) | 120 - 150 |
| Ash Content | ppm | <50 |
| Max Size (Diameter) | mm | 500 |
| Max Size (Square) | mm | 600x600 |
Applications
- CVD and PVD deposition equipment wafer stages
- Etching chamber support plates
- Ion implantation equipment components
- Diffusion furnace boat supports
- Epitaxial growth susceptors
- Semiconductor inspection and metrology equipment
- Flat panel display manufacturing equipment
Why Choose Jincheng Graphite Base Plates?
We manufacture high-precision graphite base plates and susceptors for semiconductor equipment manufacturers worldwide. Our advanced machining capability ensures tight tolerances and superior surface finish. With over 20 years of graphite processing experience, we understand the critical requirements of semiconductor manufacturing and deliver components that meet the highest quality standards. We offer both standard graphite and CVD SiC coated options to meet your specific process requirements.
FAQ
Q: Do you offer CVD silicon carbide coating for graphite base plates?
A: Yes, we can provide CVD SiC coating service on graphite base plates and other graphite components. SiC coating improves surface hardness, corrosion resistance, and reduces particle generation, making it ideal for critical semiconductor processes.
Q: What is the maximum flatness tolerance you can achieve?
A: With our precision machining and grinding capability, we can achieve flatness as tight as 0.02mm on base plates up to 300mm diameter. Larger sizes can be held to tighter tolerances than industry standard.
Q: Can you drill custom hole patterns for vacuum chucks?
A: Absolutely. We can machine custom hole patterns, grooves, and pockets according to your drawings. Our CNC machining center handles complex geometries and tight positional tolerances for vacuum chuck applications.
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