Graphite Wafer Boat for Semiconductor Processing
Product Overview
Jincheng graphite wafer boats for semiconductor processing are high-purity, precision-machined graphite carriers designed to hold silicon wafers during various semiconductor manufacturing processes including oxidation, diffusion, CVD, and epitaxy. These boats ensure uniform wafer processing and minimal particle generation.
Our semiconductor wafer boats are manufactured from ultra-high purity, fine-grain isostatic graphite that meets the strictest requirements of the semiconductor industry. Custom slot designs and wafer sizes are available to match different furnace models and wafer diameters.
Key Features
- Ultra-high purity graphite with ash content below 20 ppm for semiconductor-grade wafer processing
- Excellent thermal uniformity for consistent wafer processing results
- Precision slot design for accurate wafer placement and minimal contact area
- Low particle generation to maintain cleanroom environment integrity
- High temperature stability up to 1200°C in oxidizing and reducing atmospheres
- Dimensional consistency for automated wafer handling systems
- Custom sizes available for 100mm, 150mm, 200mm, and 300mm wafers
- Long service life with proper furnace atmosphere and handling procedures
Technical Specifications
| Parameter | Value |
|---|---|
| Material | Ultra-high purity fine grain graphite |
| Density | 1.80 - 1.90 g/cm3 |
| Ash Content | < 20 ppm (semiconductor grade) |
| Grain Size | 5 - 10 microns (fine grain) |
| Shore Hardness | 65 - 80 HS |
| Flexural Strength | 60 - 90 MPa |
| Max Working Temperature | 1300°C (in oxidizing atmosphere) |
| Wafer Diameter | 100mm, 150mm, 200mm, 300mm |
| Slot Pitch | Custom per wafer size and boat design |
| Slot Tolerance | ±0.02 mm |
Applications
- Wafer oxidation and diffusion furnaces for thermal processing
- CVD (chemical vapor deposition) processes for thin film deposition
- Epitaxial growth furnaces for silicon epitaxy
- Annealing and stress relief furnaces for wafer processing
- Cleanroom wafer processing for semiconductor manufacturing fabs
- R&D wafer processing for semiconductor research institutes
Why Choose Jincheng Graphite Wafer Boats?
- Semiconductor-grade ultra-high purity graphite for the most demanding wafer processing applications
- Precision CNC machining with tight slot tolerances for accurate wafer placement
- Experience with major furnace brands including TEL, Applied Materials, and Kokusai
- Custom boat designs optimized for your specific furnace and wafer processing requirements
- Competitive pricing compared to imported semiconductor graphite carriers
- Fast delivery - standard boats within 1 week, custom within 2-3 weeks
- Technical support for boat design optimization and process improvement
- Global shipping to semiconductor fabs and research institutes worldwide
Frequently Asked Questions
Q1: What wafer sizes do your boats support?
A: We manufacture wafer boats for all common wafer sizes including 100mm (4 inch), 150mm (6 inch), 200mm (8 inch), and 300mm (12 inch). Custom sizes are also available for special wafer formats.
Q2: How long do wafer boats last in semiconductor furnaces?
A: Boat life depends on furnace atmosphere and processing conditions. Under typical oxidation and diffusion conditions, graphite wafer boats last 6-12 months before needing replacement.
Q3: Can you manufacture boats with tantalum carbide (TaC) coating?
A: Yes, we offer TaC coating services for extended boat life and reduced metal contamination in advanced semiconductor processing applications.
Q4: Do you provide cleanroom packaging?
A: Yes, all our semiconductor graphite components are cleaned and packaged in a cleanroom environment to meet semiconductor manufacturing standards.
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