Graphite Wafer Carrier and Wafer Boat for Semiconductor Processing
Product Overview
Our graphite wafer carriers and wafer boats are precision-machined holders that transport and support silicon wafers through high-temperature semiconductor manufacturing processes including diffusion, oxidation, LPCVD, and epitaxial deposition. Made from high-purity, fine-grain isostatic graphite, these carriers maintain wafer alignment and flatness at temperatures up to 1200°C while minimizing particle generation and metal contamination. We manufacture standard horizontal wafer boats for 3-inch, 4-inch, 6-inch, and 8-inch wafers, as well as custom vertical carriers and pocketed plates for specific semiconductor equipment.
Wafer carriers are critical consumable components in semiconductor fabs and wafer processing shops. The carrier must hold wafers at precise spacing, prevent wafer-to-wafer contact, and maintain dimensional stability through thousands of thermal cycles. At Jincheng Graphite, we machine wafer carriers to tight tolerances with smooth, chip-free edges, using high-purity graphite grades that meet semiconductor purity requirements. We also supply SiC-coated wafer boats for applications where graphite particle generation must be minimized.
Key Features
- Semiconductor-grade purity - low metal contamination for wafer processing
- Precision wafer pockets - slots machined to exact wafer thickness and spacing
- High temperature stability - maintains flatness at 1200°C and above
- Smooth chip-free edges - minimizes particle generation during wafer loading
- Standard wafer sizes - 3", 4", 6", and 8" wafer boats available
- SiC coating option - for ultra-low particle and contamination requirements
- Custom slot counts - from 5-slot R&D boats to 100+ slot production carriers
- Dimensional repeatability - consistent slot geometry across production batches
Technical Specifications
| Parameter | Value |
|---|---|
| Material | High-purity fine-grain isostatic graphite |
| Bulk Density | 1.80 - 1.88 g/cm³ |
| Ash Content | < 50 ppm |
| Grain Size | < 10 µm |
| Max Process Temperature | 1200°C (uncoated), 1400°C (SiC-coated) |
| Wafer Sizes | 3", 4", 5", 6", 8" |
| Slot Spacing | 4.76 mm (3/16"), 6.35 mm (1/4"), custom |
| Slot Tolerance | ±0.05 mm |
| Flatness | < 0.1 mm per 200 mm |
| Slot Count | 5 - 100 slots (custom) |
| Coating Option | SiC CVD coating (20-50 µm thickness) |
| Surface Finish | Ra 1.6 µm (precision machined) |
Applications
- Diffusion furnaces - wafer boats for dopant diffusion processes
- Oxidation furnaces - carriers for thermal oxidation of silicon wafers
- LPCVD processes - low-pressure chemical vapor deposition wafer boats
- Epitaxy - wafer holders for silicon epitaxial growth
- Wafer carrier R&D - small custom carriers for university and lab research
- SiC power device manufacturing - high-temperature wafer boats for SiC processing
Why Choose Jincheng Graphite?
- Semiconductor-grade material - high-purity graphite for wafer processing
- Precision slot machining - CNC-machined slots with tight tolerances
- Standard and custom boats - common wafer sizes in stock, custom on request
- SiC coating capability - offer both uncoated and SiC-coated wafer carriers
- Particle control - smooth edges and fine-grain material minimize particles
- Fast prototyping - custom wafer boats within 10-15 business days
- Cost advantage - significantly lower than imported wafer boat suppliers
- Global supply - wafer fabs and processing shops worldwide
FAQ
Q: What is the difference between coated and uncoated wafer boats?
A: Uncoated graphite boats are lower cost and work well for diffusion and oxidation. SiC-coated boats provide an impermeable barrier that prevents graphite particles and trace contaminants from reaching the wafer surface, making them preferred for advanced nodes and critical epitaxial processes.
Q: How many wafers does a standard 6-inch boat hold?
A: A standard 6-inch horizontal wafer boat typically holds 25, 50, or 100 wafers depending on slot spacing. Common configurations are 25-slot (for 4-inch) and 50-slot (for 6-inch). We manufacture any slot count you require.
Q: How do I clean a graphite wafer carrier?
A: Graphite wafer boats should be cleaned with dry nitrogen or compressed air to remove loose particles. Do not use liquid cleaning, as graphite is porous and can trap moisture. For deeper cleaning, a high-temperature bake-out in inert gas at 1000°C is recommended before returning the boat to production.
Q: Can you replicate our existing wafer boat design?
A: Yes. Send us a drawing or a sample wafer boat, and we will reverse-engineer an equivalent or improved version. We can also modify slot spacing, boat length, or pocket geometry to match your specific furnace system.
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