MOCVD Graphite Wafer Carrier Susceptor
Product Overview
Our MOCVD graphite wafer carriers (also called susceptors) are precision machined from high-purity isostatic graphite and designed for LED and power device manufacturing. These graphite susceptors provide uniform heating, excellent flatness, and long service life in MOCVD epitaxial deposition processes.
We manufacture graphite wafer carriers for all major MOCVD reactor platforms, including Veeco, Aixtron, and Taiyo Nippon Sanso. CVD SiC coating is available for extended lifetime and reduced particle contamination. Custom pocket designs for various wafer sizes and configurations are available.
Key Features
- High-purity isostatic graphite substrate material
- Excellent flatness for uniform wafer heating
- CVD SiC coating option for extended service life
- Precision machined wafer pockets with accurate depth control
- Low outgassing for cleanroom semiconductor processing
- Compatible with major MOCVD reactors
- Custom pocket configurations available
- Reconditioning service for used carriers
Technical Specifications
| Parameter | Specification |
|---|---|
| Material | High purity isostatic graphite |
| Density | 1.85 g/cm³ |
| Purity | ≥99.99% |
| Wafer Size | 2" / 4" / 6" (custom available) |
| Flatness | ≤0.03 mm |
| Max Temperature | 1200°C (MOCVD process range) |
| Coating | CVD SiC coating available |
| Reactor Compatibility | Veeco K4/K6, Aixtron G10/G18, etc. |
Applications
- LED epitaxial growth (GaN on sapphire)
- Power semiconductor (GaN on Si/SiC) manufacturing
- RF device epitaxial deposition
- MicroLED mass production processes
- Optoelectronic device fabrication
Why Choose Jincheng Graphite?
- Specialized in semiconductor graphite components for over 20 years
- Precision CNC machining with sub-millimeter tolerances
- CVD SiC coating capability in-house or partner facility
- Replacement susceptors for all major reactor brands
- Competitive pricing compared to OEM parts
- Fast delivery for urgent production needs
- Quality inspection with CMM and flatness measurement
FAQ
Q: How often should MOCVD graphite susceptors be replaced?
A: Typical lifetime is 2-5 years depending on process conditions and coating. SiC coated susceptors last significantly longer than uncoated ones. We also offer reconditioning service to extend usable life.
Q: Do you offer SiC coating for graphite wafer carriers?
A: Yes, we provide CVD SiC coating service with uniform coating thickness and excellent adhesion. The coating dramatically reduces particle generation and extends the service life of graphite susceptors in MOCVD processes.
Q: Can you match OEM susceptor dimensions exactly?
A: Yes, we can reverse-engineer and reproduce OEM graphite wafer carriers based on your existing parts or drawings. Please provide a sample or detailed drawing for manufacturing.
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